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NanoCalc 反射膜厚測量系統
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薄膜的光學特性主要有反射和干涉。NanoCalc薄膜反射測量系統可以用來進行10nm -250um的膜厚分析測量，對單層膜的分辨率為0.1nm。根據測量軟件的不同，在1秒鐘內可以分析單層或多達到10層的膜厚。 |
產品特點
- 可分析單層或多層薄膜；
- 分辨率達0.1nm；
- 適合于在線監測；
使用原理
常用的兩種測量薄膜的特性的方法為光學反射和投射測量、橢圓光度法測量。NanoCalc利用反射原理，通過測量寬光譜范圍內的反射率曲線來進行膜厚測量。
查找n和k值
可以進行多達十層的薄膜測量，薄膜和基體材質可以是金屬、電介質、無定形材料或硅晶等。NanoCalc軟件包含了大多數材料的n和k值數據庫，用戶也可以自己添加和編輯。
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應用
NanoCalc薄膜反射材料系統適合于在線膜厚測量，包括氧化層、中氮化硅薄膜、感光膠片及其它類型的薄膜。NanoCalc也可測量在鋼、鋁、銅、陶瓷、塑料等物質上的抗反射涂層、抗磨涂層等。
NanoCalc Systems Available
NANOCALC-2000-UV-VIS-NIR |
Wavelength: |
250-1100 nm |
Thickness: |
10 nm-70 um |
Light source: |
Deuterium and Tungsten Halogen |
NANOCALC-2000-UV-VIS |
Wavelength: |
250-850 nm |
Thickness: |
10 nm-20 um |
Light source: |
Deuterium and Tungsten Halogen |
NANOCALC-2000-VIS-NIR |
Wavelength: |
400-1100 nm |
Thickness: |
20 nm-10 um (optional 1 um-250 um) |
Light source: |
Tungsten Halogen |
NANOCALC-2000-VIS |
Wavelength: |
400-850 nm |
Thickness: |
50 nm-20 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-NIR |
Wavelength: |
650-1100 nm |
Thickness: |
70 nm-70 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-NIR-HR |
Wavelength: |
650-1100 nm |
Thickness: |
70 nm-70 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-512-NIR |
Wavelength: |
900-1700 nm |
Thickness: |
50 nm-200 um |
Light source: |
High-power Tungsten Halogen |
For Reflectometry applications, the following items are required:
NC-2UV-VIS100-2 |
Bifurcated UV fiber
400 um x 2m
2x SMA connectors
Flexible metal jacketing |
NC-STATE |
Single point reflection measurement for non transparent samples |
| Step-Wafer |
5 Steps 0-500 mm, calibrated 4" |
If using a microscope, the following items are also needed:
NC-7UV-VIS200-2 |
Reflection probe for application microscopy with MFA-C-Mount |
| Step-Wafer |
5 Steps 0-500 mm, calibrated 4" |
NanoCalc Specifications
Angle of incidence: |
90° |
Number of layers: |
3 or fewer |
Reference measurement needed: |
Yes (bare substrate) |
Transparent materials: |
Yes |
Transmission mode: |
Yes |
Rough materials: |
Yes |
Measurement speed: |
100 milliseconds to 1 second |
On-line possibilities: |
Yes |
Mechanical tolerance (height): |
With new reference or collimation (74-UV) |
Mechanical tolerance (angle): |
Yes, with new reference |
Microspot option: |
Yes, with microscope |
Vision option: |
Yes, with microscope |
Mapping option: |
6" and 12" XYZ mapping tables |
Vacuum possibilities: |
Yes |
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線陣CCD光纖光譜儀
